JPH0352249B2 - - Google Patents

Info

Publication number
JPH0352249B2
JPH0352249B2 JP57148388A JP14838882A JPH0352249B2 JP H0352249 B2 JPH0352249 B2 JP H0352249B2 JP 57148388 A JP57148388 A JP 57148388A JP 14838882 A JP14838882 A JP 14838882A JP H0352249 B2 JPH0352249 B2 JP H0352249B2
Authority
JP
Japan
Prior art keywords
vibration
main
main vibrating
piezoelectric vibrator
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57148388A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5937722A (ja
Inventor
Mutsumi Negita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP14838882A priority Critical patent/JPS5937722A/ja
Publication of JPS5937722A publication Critical patent/JPS5937722A/ja
Publication of JPH0352249B2 publication Critical patent/JPH0352249B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP14838882A 1982-08-26 1982-08-26 縦振動型圧電振動子 Granted JPS5937722A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14838882A JPS5937722A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14838882A JPS5937722A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子

Publications (2)

Publication Number Publication Date
JPS5937722A JPS5937722A (ja) 1984-03-01
JPH0352249B2 true JPH0352249B2 (en]) 1991-08-09

Family

ID=15451651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14838882A Granted JPS5937722A (ja) 1982-08-26 1982-08-26 縦振動型圧電振動子

Country Status (1)

Country Link
JP (1) JPS5937722A (en])

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220508A (ja) * 1985-03-26 1986-09-30 Kinseki Kk 水晶片の製造方法
JPS6328853A (ja) * 1986-07-22 1988-02-06 Daido Steel Co Ltd バツチ式浸炭方法
JPH0754891B2 (ja) * 1987-06-02 1995-06-07 セイコー電子部品株式会社 縦水晶振動子
JPH0828639B2 (ja) * 1987-07-17 1996-03-21 セイコー電子工業株式会社 縦水晶振動子
JPS6465912A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
JPS6465913A (en) * 1987-09-04 1989-03-13 Seiko Electronic Components Longitudinal crystal resonator
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
JP2592280B2 (ja) * 1988-02-18 1997-03-19 セイコー電子工業株式会社 縦水晶振動子
JPH01293707A (ja) * 1988-05-20 1989-11-27 Seiko Electronic Components Ltd 長辺縦振動子
JPH02124616A (ja) * 1988-06-17 1990-05-11 Matsushima Kogyo Co Ltd 縦振動子
JPH02132913A (ja) * 1988-11-14 1990-05-22 Seiko Electronic Components Ltd 縦水晶振動子
JPH0831762B2 (ja) * 1988-11-14 1996-03-27 セイコー電子工業株式会社 縦水晶振動子
JPH0831761B2 (ja) * 1988-11-14 1996-03-27 セイコー電子工業株式会社 縦水晶振動子
JPH0831760B2 (ja) * 1988-11-14 1996-03-27 セイコー電子工業株式会社 縦水晶振動子の電極構造
JPH0831765B2 (ja) * 1988-11-17 1996-03-27 セイコー電子工業株式会社 縦水晶振動子
JPH02260710A (ja) * 1989-03-30 1990-10-23 Seiko Electronic Components Ltd 縦水晶振動子
JPH03192810A (ja) * 1989-12-21 1991-08-22 Seiko Electronic Components Ltd Ｈ型屈曲水晶振動子
US5144184A (en) * 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
JPH0454010A (ja) * 1990-06-21 1992-02-21 Seiko Electronic Components Ltd 縦水晶振動子
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US7005946B2 (en) 2002-08-06 2006-02-28 The Charles Stark Draper Laboratory, Inc. MEMS piezoelectric longitudinal mode resonator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH600423B5 (en]) * 1975-09-18 1978-06-15 Ebauches Sa
JPS5391688A (en) * 1977-01-24 1978-08-11 Seiko Epson Corp Crystal oscillator
JPS5950128B2 (ja) * 1978-04-06 1984-12-06 セイコーエプソン株式会社 縦振動子の支持構造
JPS55140313A (en) * 1979-04-18 1980-11-01 Seiko Instr & Electronics Ltd Small-size piezoelectric vibrator of outline vibration mode

Also Published As

Publication number Publication date
JPS5937722A (ja) 1984-03-01

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